Design and prototyping an electric-thermo-phneumatic actuator for biochips
碩士 === 華梵大學 === 機電工程研究所 === 93 === The object of this research is to design and prototype a electrothermal actuator system, which including a micro channel, a microvalve, and a micropump, as implementing BioMEMS micromachining technology. This research has successfully established electrical, therma...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45606279488767029586 |