Finite Element Analysis of Bending strength and Fatigue Life of Silicon Micro-Cantilever Beams

碩士 === 逢甲大學 === 材料與製造工程所 === 93 === Abstract This thesis utilizes Finite Element software ANSYS, to analyze and simulate flexural stress-strain behavior of Si micro-cantilever beam subjected to concentrated loading without and with offset. With fatigue S-N curve obtained from experiment in literat...

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Bibliographic Details
Main Authors: Li-chiu Liu, 劉麗秋
Other Authors: Hsien-Kuang Liu
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/19593967465741875594