The Growth Mechanism of Polycrystalline Diamond Thin Films Deposited by MACVD under Bias with Diamond Seed Embedded
碩士 === 大葉大學 === 電機工程學系碩士班 === 93 === The grain size in polycrystalline diamond films is determined by many factors including growth period, ratio of reacting gases, and nucleation mechanism. In this study, using CH4 and H2 as working gas, microwave assisted CVD was utilized to deposit polycrystallin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77627594864885722082 |