Investigation of thin film surface acoustic wave devices of AlN/GaN/Sapphire
碩士 === 中原大學 === 電子工程研究所 === 93 === In recent years, surface acoustic wave devices have become an attractive research field because the devices can be applied in communication field, and it suits to be sensors for it’s high sensitivity. Using piezoelectric thin films for layered structure SAW devices...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/sc4fnw |