Electromagnetic Scanning Mirror Fabricated by 193nm Excimer Laser
碩士 === 中華技術學院 === 機電光工程研究所碩士班 === 93 === Abstract In this paper, a polymer electromagnetic scanning mirror, which is used as the reference mirror of optical coherence system, has been fabricated by 193nm excimer laser. The scanning mirror with specifically designed suspension has been analyzed by us...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67839937444255648539 |