Development and Analysis of Scanning Capacitance Microscopy Technology
碩士 === 長庚大學 === 電子工程研究所 === 93 === With the shrinkage of MOSFETs, accurately controlling doping concentrations becomes more important. SCM has been developed as a tool for analyzing doping profiles. The SCM samples are similar to MOS capacitors. The behavior of carriers can be monitored by analyz...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97836769465525265398 |