Integration of Self-Assembled Monolayer Patterning and Deep Etching Technique for Fabrication of High Aspect Ration Micro/Nano Structures
碩士 === 國立中正大學 === 光機電整合工程所 === 93 === This research hopes to make advancedly and widely and endure the rice structure a less than it, assemble the membrane by oneself through the pattern , and replace tradition with it and is only covered , only hinders alternative to etch. Experiment separately in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/83432554200823786084 |