Applying Machine Vision Method in Wafer Surface Defect Inspection of Research
碩士 === 元智大學 === 工業工程與管理學系 === 92 === Because of high type I error rate resulted by using an optical inspection machine for a local wafer manufacturing company, the inspection successful rate is only about 50%. The focus of this research is to develop an inspection software that will significantly re...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43128803705197054099 |