Study of Chemical Scrubber Technology for Toluene and PGME inSemiconductor Processes
碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 92 === The semiconductor and optical-electric industries manufacture use many chemical solvent, such as isopropyl alcohol (IPA), acetone. Notably, large amount of volatile organic compounds (VOCs) are released into atmosphere during manufacturing processes. Presen...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36606449372161568514 |