| Summary: | 碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 92 === This work mainly used semi-conductor technology and micro-electro- mechanical system (MEMS) technology to fabricate the micro-glucose sensors with planar electrodes on glass substrates. The cleaning techniques for the glass substrates, the thickening techniques for the spin-coated photo-resist and the etching technology of ITO glass have been developed in this work. Besides, the planar electrodes have been applied to the fabrication of the micro-glucose sensors. The substrate cleaning, photo-lithography, evaporation, sputtering and lift-off processes have been integrated to fabricate the micro-glucose sensors on the glass substrates. Our experimental results show that the micro-glucose sensors have distinct response to the glucose content in the samples. At the same time, oxidation reduction curve shows symmetrical, so we know the electrodes of glucose oxidase have reversibility. This proves that the micro planar electrodes can be applied in the micro-glucose sensors very well. The response current of the micro-glucose sensors was as high as 0.09 to 0.5 μA when the glucose concentration in the samples was in the range of 0 to 600 mg/dL.
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