Fabrication Study on the Glucose Microsensors with Planar Electrodes
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 92 === This work mainly used semi-conductor technology and micro-electro- mechanical system (MEMS) technology to fabricate the micro-glucose sensors with planar electrodes on glass substrates. The cleaning techniques for the glass substrates, the thickening tech...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96693598288969905140 |