| Summary: | 碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 92 === The continuous trend toward smaller structures and thinner layers in semiconductor and TFT/LCD manufacturing directs attention more and more toward yield-affecting influences from the clean room air. Not only particle been a factor that is not easy to control but also so-called airborne molecular contamination (AMC) is a problem. VOCs are typical AMCs in Fabs.
In this thesis, field monitoring and analyzing on concentration of various VOCs of the so-called Red, Green, and Blue areas of a Color Filter Fab were conducted. The results show that the Trap, Column and SAW sensor can be block-off due to deposition VOCs, such as NMP and HMDS, which have high molecular weight. IPA and Acetone has approximate Retention Time to water vapor, creating reading error. Nevertheless, the SAW exhibits excellent real time monitoring function for other VOCs such as Toluene, Xylene, PGME, and PGMEA.
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