Monitoring and Analyzing Volatile Organic Compounds by Gas Chromatograph/Surface Acoustic Wave sensors
碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 92 === The continuous trend toward smaller structures and thinner layers in semiconductor and TFT/LCD manufacturing directs attention more and more toward yield-affecting influences from the clean room air. Not only particle been a factor that is not easy to contro...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06323641673027443828 |