A Study of High Frequency Based Rapid and Locally Selective Anodic Bonding
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 92 === Anodic bonding is one kind of the common and useful bonding method in MEMS process. This study provided a new method to assist anodic bonding by induction heating. By electromagnetic radiation, the area of magnetic material can be rapidly heated. Be...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91742825812338718759 |