Development of Nano-positioning Stage and Optical Displacement Measurement System
碩士 === 南台科技大學 === 機械工程系 === 92 === Abstract With the development of precision industry, miniaturization and precision have become the trends of the times. Due to developments in this direction, there are increasing demands for micrometer and even sub-micrometer positioning systems. In the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98504814187806945273 |