Nanocrystalline diamond SAW filter
碩士 === 國立臺灣科技大學 === 機械工程系 === 92 === Diamond has the highest acoustic propagation property, making it an ideal substrate for surface acoustic wave (SAW) device when coupled with piezoelectric materials. In the work, SAW devices based on ZnO/NCD/silicon layered structure are successfully performed. T...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/27728383373259094994 |