Growth of RuO2 Nanorods via Metalorganic Chemical Vapor Deposition

碩士 === 國立臺灣科技大學 === 電子工程系 === 92 === The self-assembled and well-aligned ruthenium dioxide (RuO2) nanorods, using (C11H19O2)2(C8H12)Ru as the precursor, have been grown on various substrates with different orientations via the technique of cold-wall metalorganic chemical vapor deposition (MOCVD). Th...

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Bibliographic Details
Main Authors: Chen Chia-Chen, 陳佳甄
Other Authors: Huang Ying-Sheng
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/95877852544854255027