Mu synthesis Control of Scanning Probe Microscope for Nanolithography
碩士 === 國立臺灣大學 === 機械工程學研究所 === 92 === This thesis addresses the 2-dimensional scanning probe microscope (SPM) lithography by scratching the sampling surface. The previous research has shown that servo controller has significant effect on the lithography. Carefully designed controller achieves more u...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34648480140321362571 |