The study of an integrated effectiveness evaluation method for a semiconductor AMHS including shortcuts
碩士 === 國立臺灣大學 === 機械工程學研究所 === 92 === The automated material handling system (AMHS) is an important role in a 300mm semiconductor wafer manufacturing system. Peters & Yang[Yang & Peters，1997；Peters & Yang，1997]pointed that an AMHS with turntables and/or shortcuts appropriately can reduce...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38397703568857828719 |