Simulation and Controller Design of Magnetic-levitated Platform System
碩士 === 國立臺灣大學 === 電機工程學研究所 === 92 === High technology develops continuously. So the precision of semiconductor must promote continuously especially. This makes the requirement for ducting off from semiconductor foundry increases constantly. The thesis to this industrial trend has developed the intel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ajqkj6 |