Knowledge-Based OHT Dispatching in 300mm Semiconductor Manufacturing
碩士 === 國立臺灣大學 === 電機工程學研究所 === 92 === Among the proposed automatic material handling systems (AMHS) solutions, OHT (Overhead Hoist Transport) is a promising technology to fulfill the requirements of transportation automation in intrabays and to realize tool-to-tool delivery in a 300mm fab. Limited...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/96346166261047944598 |