Spin-Coated Mesoporous Silica Films from a Surfactant-Templated Method: Preparation and Applications as Low-k Materials and Antireflection Films
博士 === 國立臺灣大學 === 化學工程學研究所 === 92 === The preparation of spin-on mesoporous silica films and their applications as low dielectric constant (low-k) films and anti-reflection (AR) films were studied in this dissertation. The pores were introduced via the surfactant-templated method, and the film was p...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97926441556379886789 |