| Summary: | 碩士 === 國立臺灣大學 === 工程科學與海洋工程學系 === 92 === Abstract
This article mainly focuses on the research of the effect of support structure on the sensitivity of micromachined accelerometer, which includes single cantilever support, double cantilevers support and 4-end multiple-support and all the effects of different considered dimensions.
Micromachined accelerometer is used to measure acceleration by using support structure and seismic mass principles of the vibration theory, but the external acceleration not in the sensing axial direction usually affect the quality of the measured results, so this article is going to study and analyze the effect of different types of support structure on the system sensitivity. Three types of micro-activated structures will be studied, that is, single cantilever support, double cantilever support and 4-end multiple-support, respectively, and different acceleration such as vertical acceleration, lateral acceleration, and axial acceleration will be studied regarding to their effect on the sensitivity change of different axes, respectively, finally, a simulation will be performed on the sensitivity change caused by different micro-activated structure dimensional change.
We found from the numerical simulation result that the main factors affecting the sensor device quality are the assignment of the support structure position and micro-activated structure dimensions, if same micro-activated structure dimension is used, the effect of lateral acceleration on the sensitivity of the double cantilever support is smaller than that of the single cantilever support, but there is no improvement in the sensitivity if the acceleration is an axial acceleration, and the effect of non-sensing axial force on the system sensitivity of the 4-end multiple-support is smaller than that of the single cantilever support.
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