The Sensitivity of Microaccelerometers to Different Confiqulation
碩士 === 國立臺灣大學 === 工程科學與海洋工程學系 === 92 === Abstract This article mainly focuses on the research of the effect of support structure on the sensitivity of micromachined accelerometer, which includes single cantilever support, double cantilevers support and 4-end multiple-support and all the e...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87052111943286860670 |