Investigation of ZnSe Heteroepitaxy Metal-Semiconductor-Metal Photodetectors with ITO Electrode Integrated with NMOS Transistor
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === In this thesis, the low cost IR furnace chemical vapor deposition system is used to obtain the ZnSe epilayers. The quality of ZnSe epilayers is analyzed by the XRD, SEM and photoluminescence (PL) measurement. The ZnSe epilayers was used to be the MSM photodetect...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47167248317308740865 |