Fabrication of the electrostatic micro rotational actuator by thick photoresist process
碩士 === 國立臺灣師範大學 === 機電科技研究所 === 92 === The research has developed the electrostatic micromechanism-drive actuator through the combination of low-cost SU-8 thick resist process and etch release technique. The SU-8 thick resist process can be used to fabricate the high aspect ratio microstructures tha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56645514504939517806 |