A study of Modified VMEWMA controller
碩士 === 國立清華大學 === 統計學研究所 === 92 === Many IC manufacturing processes have, by nature, Multiple Input and Multiple Output (MIMO) system. For a drifted MIMO system, the double Multivariate Exponentially Weighted Moving Average (MEWMA) feedback controller is a popular run-to-run (R2R) control scheme. Al...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13641554489581770426 |