A Micro Scanning Mirror Actuated by <110> Vertical Comb Actuators
碩士 === 國立清華大學 === 動力機械工程學系 === 92 === Scanning micromirrors are one of the key components in MOEMS (Micro-opto-Electro- mechanical systems). They have been applied for a variety of applications such as optical switches, optical data storage, barcode readers, laser printers and image displays. Micro...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00037203908010320823 |