Fabrication and Analysis of Ultra flat Thin Film

碩士 === 國立清華大學 === 材料科學工程學系 === 92 === The morphology of ultra thin Al films deposited by sputter onto three different substrates ;in three different temprature; with different thickness was investigate.

Bibliographic Details
Main Authors:	C.T.Hsu, 許景棟
Other Authors:	S.T.Wu
Format:	Others
Language:	zh-TW
Published:	2004
Online Access:	http://ndltd.ncl.edu.tw/handle/b9a82r

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spelling	ndltd-TW-092NTHU51590482019-05-15T19:38:04Z http://ndltd.ncl.edu.tw/handle/b9a82r Fabrication and Analysis of Ultra flat Thin Film 超平坦薄膜之製作與分析 C.T.Hsu 許景棟碩士國立清華大學材料科學工程學系 92 The morphology of ultra thin Al films deposited by sputter onto three different substrates ;in three different temprature; with different thickness was investigate. S.T.Wu 吳信田 2004 學位論文 ; thesis 116 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學工程學系 === 92 === The morphology of ultra thin Al films deposited by sputter onto three different substrates ;in three different temprature; with different thickness was investigate.
author2	S.T.Wu
author_facet	S.T.Wu C.T.Hsu 許景棟
author	C.T.Hsu 許景棟
spellingShingle	C.T.Hsu 許景棟 Fabrication and Analysis of Ultra flat Thin Film
author_sort	C.T.Hsu
title	Fabrication and Analysis of Ultra flat Thin Film
title_short	Fabrication and Analysis of Ultra flat Thin Film
title_full	Fabrication and Analysis of Ultra flat Thin Film
title_fullStr	Fabrication and Analysis of Ultra flat Thin Film
title_full_unstemmed	Fabrication and Analysis of Ultra flat Thin Film
title_sort	fabrication and analysis of ultra flat thin film
publishDate	2004
url	http://ndltd.ncl.edu.tw/handle/b9a82r
work_keys_str_mv	AT cthsu fabricationandanalysisofultraflatthinfilm AT xǔjǐngdòng fabricationandanalysisofultraflatthinfilm AT cthsu chāopíngtǎnbáomózhīzhìzuòyǔfēnxī AT xǔjǐngdòng chāopíngtǎnbáomózhīzhìzuòyǔfēnxī
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Fabrication and Analysis of Ultra flat Thin Film

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