Fabrication and Analysis of Ultra flat Thin Film
碩士 === 國立清華大學 === 材料科學工程學系 === 92 === The morphology of ultra thin Al films deposited by sputter onto three different substrates ;in three different temprature; with different thickness was investigate.
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/b9a82r |