Synthesize Highly-textured AlN Thin Film and Study on Its Application to Thin Film Bulk Acoustic Wave Resonators

Synthesize Highly-textured AlN Thin Film and Study on Its Application to Thin Film Bulk Acoustic Wave Resonators

碩士 === 國立清華大學 === 材料科學工程學系 === 92 ===

Bibliographic Details
Main Authors:	Yung-Chen Lin, 林永振
Other Authors:	Nyan-Hwa Tai
Format:	Others
Language:	zh-TW
Published:	2004
Online Access:	http://ndltd.ncl.edu.tw/handle/v3j7hp

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