Synthesize Highly-textured AlN Thin Film and Study on Its Application to Thin Film Bulk Acoustic Wave Resonators
碩士 === 國立清華大學 === 材料科學工程學系 === 92 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v3j7hp |