Applications of Coloured Petri Net and Genetic Algorithms to Cluster Tool Scheduling
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 92 === In this thesis, we propose a method which uses Coloured Petri Net (CPN) and Genetic Algorithms (GAs) to obtain an optimal or near optimal schedule for the cluster tool. Generally speaking, the operations of the cluster tool for producing a wafer usually can...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30701896805552312035 |