Study of Mold Releasing Agent and Surface Energy for Nanoimprint Lithography
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 92 === There are two major topics in this thesis. One is the research of mold release agents and surface energy for nanoimprint lithography . The other is the temperature distribution of e-beam patterning. The following is the first major topic. As all imprint tech...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32596559059300131719 |