Noise Cancellation, and Exponential Weighted Recursive Control of Etching Process
碩士 === 國立交通大學 === 電機與控制工程系所 === 92 === We use adaptive lter to reduce noise disturbance of semiconductor etching process, and try to increase Cpk which can be used to adjudge level of control. Considering time variant system, we also try to use exponential weighted recursive control to modify our pr...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22940799087844402869 |