Optimal Operation of Chemical Mechanical Planarization：Dynamic Programming Approach
碩士 === 國立交通大學 === 機械工程系所 === 92 === In this thesis, the impact on non-planarization index by the down force and rotational speed during a SiO2 or Cu CMP process was investigated. Since the magnitudes of down force and rotational speed have limits, we choose the dynamic programming approach because o...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13235661391273876060 |