Molecular Dynamics Simulation of Sputtering of Copper Atoms Due to Argon Ion Bombardment
碩士 === 國立交通大學 === 機械工程系所 === 92 === Sputtering of copper metal targets (100) due to bombardment of a single argon ion at vacuum condition is simulated using molecular dynamic simulation. A simplified EAM (embedded atom model) is used to mimic Cu-Cu interaction, while ZBL model is used to model Cu-Ar...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02948688899986234001 |