Reticle Capacity Analysis and Improvement for a Wafer Fabrication Factory
碩士 === 國立交通大學 === 管理學院碩士在職專班工業工程與管理組 === 92 === The cost for reticle-making is one of the most substantial factors in most IC foundries and design houses and every company takes lot efforts to increase its utilization. After studying the entire process flow of the photo operations, the test exposure...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/61008602388725464206 |