The Study of Rapid In-Line PECVD SiNx:H Antireflective Coating Layer on the Commercial Crystalline Silicon Solar Cells
碩士 === 國立成功大學 === 光電科學與工程研究所 === 92 === In this thesis, we use the newest commercial in-line PECVD to deposit SiNx:H antireflective coating layer in low temperature (< 300oC). And finish the contacts of solar cells by high throughput screen printing. The main discussion is the quality of SiNx...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/30777203165532994160 |