The Study of Rapid In-Line PECVD SiNx:H Antireflective Coating Layer on the Commercial Crystalline Silicon Solar Cells

碩士 === 國立成功大學 === 光電科學與工程研究所 === 92 ===   In this thesis, we use the newest commercial in-line PECVD to deposit SiNx:H antireflective coating layer in low temperature (< 300oC). And finish the contacts of solar cells by high throughput screen printing.   The main discussion is the quality of SiNx...

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Bibliographic Details
Main Authors: Sung-Yen Chen, 陳松延
Other Authors: Shoou-Jinn Chang
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/30777203165532994160