Application of Electrochemical Lithography to Self-Assemble-Monolayer Film Using Scanning Probe Microscope
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === Abstract The local anodic oxidation reaction used to grow OTS SAM on the silicon wafer is researched in the view of electrochemical reaction in this study. There are a few models for analysis of the above topics, so the tendency of oxidation behavior in C-M...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33882696682160319289 |