Theoretical Analysis and Experiments for the Planarization of Polycrystalline Diamond Film by Eximer Laser
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === The polishing by KrF eximer laser for CVD diamond film is researched in the study. Most studies about this topic are the experimental results, so the mechanism of polishing which includes the two parts of graphitization and ablation process is established an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38741683563020671490 |