Study of Pre-treatment and Post-Oxidation Annealing Effect on the GaAs Native Oxide Prepared by the Liquid Phase Oxidation Method
博士 === 國立成功大學 === 電機工程學系碩博士班 === 92 === Liquid phase chemical-enhanced oxidation (LPCEO) method has been successfully applied for growing native oxide films on GaAs near room temperature (40℃ to 70℃) without any extra assisted energy source. Unlike the other oxidation methods, the oxide film can b...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/md4x48 |