The Study of Micro-Electro-Mechanical System (MEMS) Technology for Sensor and RF Inductor Applications
博士 === 國立成功大學 === 電機工程學系碩博士班 === 92 === In this dissertation, we report the study of Micro-electro-mechanical system (MEMS) technology for sensors, including, shear-stress sensor, far infrared sensor and RF inductor applications. The Finite Element Method (FEM) package ANSYS has been employed for...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67463795207585154449 |