Investigation and Fabrication of AlGaN/InGaN/GaN DHFET
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 92 === In this thesis, we epitaxy AlGaN/GaN single heterostructure fieldeffect transistor (SHFET) and AlGaN/InGaN/GaN double heterostructure field effect transistor (DHFET). In AlGaN/InGaN/GaN DHFET, we epitaxy three structures with different InGaN thickness whic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/btwqtu |