Sliding Mode Controller For Piezo Driven Stage: A LMI Approach

• Main Authors: Chia-Chung Wu, 吳家誠
• Other Authors: Chieh-Li Chen
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/97046048328888044335

碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 92 === Owing the factors of some modeling errors, the variations of paramater, and the external disturbance, that make the failure of achieving controlling and even let the system unstable. So, it is necessary to design a robust controller. In other words, the problem of the robust controller can be transformed into linear matrix inequality (lmi) problem, and it is able to be solved by lmi. Sliding mode control is well-known for its robustness. As a system trajectory lies on the sliding surface, the control shows obvious resistant in matched disturbance. The dissertation will introduced to design a extended system which is no chattering by using lmi and sliding mode control. With the obtained model, the control structure composed of a feedforward controller and a extended system feedback controller is used to realize the high precision positioning control of the piezo driven stage. Comparaed the simulation and the experimental results, it shows the tracking and regulated aims in this study have been satisfied.