FABRICATION DEVELOPMENT FOR MICRO CHANNEL SYSTEM BY MEMS TECHNOLOGY WITH MEASUREMENTS OF THE INSIDE THERMAL TRANSPORT PROCESSCONTENTS
博士 === 國立成功大學 === 航空太空工程學系碩博士班 === 92 === The development and fabrication of a MEMS at a low temperature process is required if the MEMS system is to be made on top of an IC system. The current work presents a novel low temperature fabrication process for a microchannel system that is integrated wit...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98636517825249971720 |