Design, Fabrication of Piezoelectric Actuators and Their Applications on Atomizer/Micro-Mixers
碩士 === 國立成功大學 === 工程科學系碩博士班 === 92 === Piezoelectric materials have several advantages including compactness, high frequency response, high precision and ease to control. The present paper reports design and fabrication of LiNbO3 -based piezoelectric actuators using MEMS technology. The piezoelect...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68xzs7 |
| Summary: | 碩士 === 國立成功大學 === 工程科學系碩博士班 === 92 === Piezoelectric materials have several advantages including compactness, high frequency response, high precision and ease to control. The present paper reports design and fabrication of LiNbO3 -based piezoelectric actuators using MEMS technology. The piezoelectric actuators are first used as ultrasonic atomizers to generate mists.
Besides, mixing could be a challenging work in a microfluidic system due to low-Reynolds-number nature. We design active micro-mixers which integrate the piezoelectric actuators with PDMS microchannels. The experimental results show that the piezoelectric actuators can improve mixing performance effectively.
Furthermore, protein digestion is used to test the performance of the piezoelectric mixers. Data from mass spectrometry and high-performance liquid chromatography (HPLC) confirm that protein digestion could be significantly enhanced. The development of the micro-atomizers and micro-mixers could be useful for lab-on-a-chip systems.
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