Design, Fabrication of Piezoelectric Actuators and Their Applications on Atomizer/Micro-Mixers
碩士 === 國立成功大學 === 工程科學系碩博士班 === 92 === Piezoelectric materials have several advantages including compactness, high frequency response, high precision and ease to control. The present paper reports design and fabrication of LiNbO3 -based piezoelectric actuators using MEMS technology. The piezoelect...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/68xzs7 |