Application of Grey Prediction Process Controller on Copper Chemical Mechanical Polishing
碩士 === 國立中興大學 === 機械工程學系 === 92 === The goal of this research is to propose a grey prediction based run-to-run process control scheme that combines a grey prediction process controller and a least-squared process estimator to better control the output of the erratic and unstable dynamics of the copp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79742311863410670718 |